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Effet getter de multicouches métalliques pour des applications MEMS. Etude de la relation Elaboration - Microstructure - Comportement, Study of the getter effect for metallic materials thin films deposited by common processes of microelectronics

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Effet getter de multicouches métalliques pour des applications MEMS. Etude de la relation Elaboration - Microstructure - Comportement, Study of the getter effect for metallic materials thin films deposited by common processes of microelectronics

Lionel Tenchine

Effet getter de multicouches métalliques pour des applications MEMS. Etude de la relation Elaboration - Microstructure - Comportement, Study of the getter effect for metallic materials thin films deposited by common processes of microelectronics

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Effet getter de multicouches métalliques pour des applications MEMS. Etude de la relation Elaboration - Microstructure - Comportement, Study of the getter effect for metallic materials thin films deposited by common processes of microelectronics

Lionel Tenchine

186 pages

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