Take-back & Recycling of FUJITSU in the countries
20
pages
English
Documents
Obtenez un accès à la bibliothèque pour le consulter en ligne En savoir plus
Découvre YouScribe et accède à tout notre catalogue !
Découvre YouScribe et accède à tout notre catalogue !
20
pages
English
Documents
Obtenez un accès à la bibliothèque pour le consulter en ligne En savoir plus
- cours - matière potentielle : under contract
- packaging waste
- africa greece spain hungary sweden ireland switzerland italy turkey latvia
- electronic equipment
- back system of ara altstoff
- ara
- batteries
- www
- 3 www
Publié par
Langue
English
Ê
Ê
Ê
Ê
Ê
„
EEL5225: Principles of MEMS
Transducers (Fall 2004)
Sensor and Actuator Technology
Agenda:
Classification
Transduction Mechanisms
MEMS System
MEMS Design Methodology
MEMS Design Specifications
Reading: Senturia, Ch. 2 pp. 15-28.
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
1Ê
„
Ê
Ê
„
„
Ê
Classification
Transducer
Element that converts one form of energy to another.
May include
– sensors (for measurement)
– actuators (for doing work)
– displays
Microsensor or microactuator
a sensor or actuator that is manufactured using microfabrication
and micromachining techniques
Other microstructures that neither sense nor actuate.
Microchannels, micronozzles, microlenses, etc.
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
2Transduction Mechanisms
Taken from Smith, R.L. “Sensors”, The Electrical Engineering Handbook, Ed. Richard C. Dorf, Boca Raton, CRC Press LLC, 2000
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
3Transduction Mechanisms
Electrical
Mechanical
Piezoelectricity
Piezoresistivity
Resistive,
capacitive, and
inductive effects
Motorola’s integrated pressure sensor
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
4Transduction Mechanisms
Optical
Mechanical
Photoelastic
systems
(stress-induced
birefringence)
Interferometers
Sagnac effect
Tunable VCSELs
Doppler effect
JAMES S. HARRIS GROUP at Stanford University
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
5Transduction Mechanisms
bimorph
actuator
Mechanical
mirror
Thermal expansion
Thermal (bimetal strip, liquid-
and gas thermometers,
resonant frequency)
Radiometer effect
1mm
(light mill)
frame
mirror
mirror
metal
bimorph
z
actuators
oxide
silicon
poly-Si
silicon
x
Bimorph
substrate
actuator
Cross-sectional View
• Xie’s group at University of Florida
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
6„
Ê
Ê
Ê
Ê
MEMS Transducer Systems
Transducers
Interface
Control
Sensors
OUTSIDE
Circuits
and
WORLD Actuators
Processing
Circuits
Power
I/O Channel
Supply and USER
and Protocol
Management
Modular MEMS system design
Sensor design
Actuator design
Interface design
Packaging design
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
7„
Ê
Ê
Ê
MEMS Transducer Systems
Transducers
Interface
Control
Sensors
OUTSIDE
Circuits
and
Actuators
WORLD
Processing
Circuits
Power
I/O Channel
Supply and USER
and Protocol
Management
Separate components
Signal attenuation
Noise
Packaging
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
8„
MEMS Transducer Systems
Transducers
Interface
Control
Sensors
OUTSIDE
Circuits
and
WORLD Actuators
Processing
Circuits
Power
I/O Channel
Supply and USER
and Protocol
Management
Integrated sensors
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
9„
MEMS Transducer Systems
Transducers
Interface
Control
Sensors
OUTSIDE
Circuits
and
WORLD Actuators
Processing
Circuits
Power
I/O Channel
Supply and USER
and Protocol
Management
Integrated microsystems
EEL5225: Principles of MEMS Transducers Lecture 2 by Xie 8/25/2004
10
